GENMARK ROBOT AUTOMATION
Shoja Jamalabad, Moharram (2020)
Shoja Jamalabad, Moharram
All rights reserved. This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.
Julkaisun pysyvä osoite on
Integrated circuits are produced from wafers of semiconductor material. The industry requires precise, clean fabrication process. In any nanoscience industry, most of the fabrication process is performed in a cleanroom environment. Handling of the substrates and material is critical and demanding high speed, precise and repeatable robots. Positioning of the substrates without damaging needs precision and accurate teaching of the robot. Various types of wafer handling devices are known for transporting the wafers to and from the cassette and among processing stations. Genmark robots are multi-axis, high precision and high-speed robots, featuring a gimbal positioning platform control. These robots may operate both in cylindrical and cartesian coordinates, on a plane and in space. In this thesis, the detail of the teaching of the Genmark robot has been discussed.